Surface Morphology Patterns and Growth Process of PCVD Boron Nitride (BN) Films

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JOURNAL OF SYNTHETIC CRYSTALS ›› 1999, Vol. 28 ›› Issue (2): 177-181.

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Surface Morphology Patterns and Growth Process of PCVD Boron Nitride (BN) Films

Zhang Xiaoling;Hu Naisai;He Jiawen

Online:1999-02-15 Published:2021-01-20

Abstract

CLC Number:

O484.1

Zhang Xiaoling;Hu Naisai;He Jiawen. Surface Morphology Patterns and Growth Process of PCVD Boron Nitride (BN) Films[J]. Journal of Synthetic Crystals, 1999, 28(2): 177-181.

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Surface Morphology Patterns and Growth Process of PCVD Boron Nitride (BN) Films

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