Abstract: VO2 thermochromatic thin films have been irradiated by electron beam with energy of 1.7MeV and flux from 1013/cm2 to 1015/cm2 .Un-irradiated and irradiated samples have been characterized by XPS and UV-VIS analysis.At the same time,the hysteresis characteristics of light changing with temperature at 900nm have been studied.The results show that a part of V4+ions change into V5+ after irradiated by electron beam and the transmittance properties have obvious variation before and after irradiation.The maximum change of transmittance during phase transition process is the sample irradiated by 1014/cm2 electron beam.The change of optical transmittance properties have been discussed .

Key words: VO2 thermochromatic thin films have been irradiated by electron beam with energy of 1.7MeV and flux from 1013/cm2 to 1015/cm2 .Un-irradiated and irradiated samples have been characterized by XPS and UV-VIS analysis.At the same time,the hysteresis characteristics of light changing with temperature at 900nm have been studied.The results show that a part of V4+ions change into V5+ after irradiated by electron beam and the transmittance properties have obvious variation before and after irradiation.The maximum change of transmittance during phase transition process is the sample irradiated by 1014/cm2 electron beam.The change of optical transmittance properties have been discussed .