Numerical Analysis of the Effects of Heat Shield and Successor Heater on Heat Field of φ300mm Si Single Crystal

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2007, Vol. 36 ›› Issue (4): 832-836.

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Numerical Analysis of the Effects of Heat Shield and Successor Heater on Heat Field of φ300mm Si Single Crystal

GAO Yu;ZHOU Qi-gang;DAI Xiao-lin;XIAO Qing-hua

Online:2007-08-15 Published:2021-01-20

Abstract

CLC Number:

TN304.1

GAO Yu;ZHOU Qi-gang;DAI Xiao-lin;XIAO Qing-hua. Numerical Analysis of the Effects of Heat Shield and Successor Heater on Heat Field of φ300mm Si Single Crystal[J]. Journal of Synthetic Crystals, 2007, 36(4): 832-836.

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Numerical Analysis of the Effects of Heat Shield and Successor Heater on Heat Field of φ300mm Si Single Crystal

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