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JOURNAL OF SYNTHETIC CRYSTALS ›› 2008, Vol. 37 ›› Issue (1): 97-101.
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MA Kang;WANG Hai-yan;WU Fang;LU Jing-xiao;GAO Xiao-yong;CHEN Yong-sheng
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RSSOnline:2008-02-15
Published:2021-01-20
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MA Kang;WANG Hai-yan;WU Fang;LU Jing-xiao;GAO Xiao-yong;CHEN Yong-sheng. Study on the Microcrystalline Silicon Films by PECVD at Low Temperature[J]. Journal of Synthetic Crystals, 2008, 37(1): 97-101.
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