Optimization Design of Circular Plane Unbalanced Magnetron Sputtering Source

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2008, Vol. 37 ›› Issue (3): 759-762.

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Optimization Design of Circular Plane Unbalanced Magnetron Sputtering Source

MA Jian-ping;LIU Yan-tao

Online:2008-06-15 Published:2021-01-20

Abstract

CLC Number:

TN305

MA Jian-ping;LIU Yan-tao. Optimization Design of Circular Plane Unbalanced Magnetron Sputtering Source[J]. Journal of Synthetic Crystals, 2008, 37(3): 759-762.

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Optimization Design of Circular Plane Unbalanced Magnetron Sputtering Source

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