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JOURNAL OF SYNTHETIC CRYSTALS ›› 2009, Vol. 38 ›› Issue (4): 831-835.

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Influence of Substrate Temperature on the Growth of μc-SiGe Thin Film

ZHANG Li-ping;ZHANG Jian-jun;ZHANG Xin;SUN Jian;ZHAO Ying   

  • Online:2009-08-15 Published:2021-01-20

CLC Number: