Exploration of Magnetron Sputtering Technics for Preparing High-phosphorous-doped p-type ZnO Thin Films via Phosphorous Diffusion

JOURNAL OF SYNTHETIC CRYSTALS ›› 2010, Vol. 39 ›› Issue (2): 490-493.

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Exploration of Magnetron Sputtering Technics for Preparing High-phosphorous-doped p-type ZnO Thin Films via Phosphorous Diffusion

DING Rui-qin;ZENG Qing-guang;CHEN Yi-zhan;ZHU Hui-qun;DING Xiao-gui;QI De-bei

Online:2010-04-15 Published:2021-01-20

Abstract

CLC Number:

O411

DING Rui-qin;ZENG Qing-guang;CHEN Yi-zhan;ZHU Hui-qun;DING Xiao-gui;QI De-bei. Exploration of Magnetron Sputtering Technics for Preparing High-phosphorous-doped p-type ZnO Thin Films via Phosphorous Diffusion[J]. Journal of Synthetic Crystals, 2010, 39(2): 490-493.

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Exploration of Magnetron Sputtering Technics for Preparing High-phosphorous-doped p-type ZnO Thin Films via Phosphorous Diffusion

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