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JOURNAL OF SYNTHETIC CRYSTALS ›› 2010, Vol. 39 ›› Issue (3): 603-607.

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Low Temperature Epitaxial Growth of Si and Ge Films on c-Si Substrate by Hot-wire CVD

HUANG Hai-bin;SHEN Hong-lie;TANG Zheng-xia;WU Tian-ru;ZHANG Lei   

  • Online:2010-06-15 Published:2021-01-20

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