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JOURNAL OF SYNTHETIC CRYSTALS ›› 2010, Vol. 39 ›› Issue (4): 852-856.
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ZHANG Xue-yu;WU Ai-min;FENG Yu-dong;HU Juan;YUE Hong-yun;WEN Li-shi
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RSSOnline:2010-08-15
Published:2021-01-20
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ZHANG Xue-yu;WU Ai-min;FENG Yu-dong;HU Juan;YUE Hong-yun;WEN Li-shi. Preparation of n-type Microcrystal Si: H Films by ECR-PECVD[J]. Journal of Synthetic Crystals, 2010, 39(4): 852-856.
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