Influence of Sublayer Thickness Ratio of the Fe/Si Multilayer Films on the Structure and Surface Morphology of β-FeSi2 Thin Film

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2010, Vol. 39 ›› Issue (4): 883-887.

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Influence of Sublayer Thickness Ratio of the Fe/Si Multilayer Films on the Structure and Surface Morphology of β-FeSi2 Thin Film

LU Lin-feng;SHEN Hong-lie;ZHANG Juan;JIANG Feng;LI Bin-bin;SHEN Zhou;LIU Lian-ci

Online:2010-08-15 Published:2021-01-20

Abstract

CLC Number:

TB303
TB34

LU Lin-feng;SHEN Hong-lie;ZHANG Juan;JIANG Feng;LI Bin-bin;SHEN Zhou;LIU Lian-ci. Influence of Sublayer Thickness Ratio of the Fe/Si Multilayer Films on the Structure and Surface Morphology of β-FeSi2 Thin Film[J]. Journal of Synthetic Crystals, 2010, 39(4): 883-887.

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Influence of Sublayer Thickness Ratio of the Fe/Si Multilayer Films on the Structure and Surface Morphology of β-FeSi2 Thin Film

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