Research on Oxide Layer Characteristics in ELID Pre-dressing Process of SiC Single Crystal Slice

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2010, Vol. 39 ›› Issue (4): 1055-1059.

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Research on Oxide Layer Characteristics in ELID Pre-dressing Process of SiC Single Crystal Slice

XIAO Qiang;LI Yan;ZHU Yu-quan

Online:2010-08-15 Published:2021-01-20

Abstract

CLC Number:

O649

XIAO Qiang;LI Yan;ZHU Yu-quan. Research on Oxide Layer Characteristics in ELID Pre-dressing Process of SiC Single Crystal Slice[J]. Journal of Synthetic Crystals, 2010, 39(4): 1055-1059.

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Research on Oxide Layer Characteristics in ELID Pre-dressing Process of SiC Single Crystal Slice

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