Thermal Analysis of Susceptor Structure with Ring Groove in Vertical MOCVD Reactor

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2010, Vol. 39 ›› Issue (4): 1072-1077.

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Thermal Analysis of Susceptor Structure with Ring Groove in Vertical MOCVD Reactor

LI Zhi-ming;HAO Yue;ZHANG Jin-cheng;CHEN Chi;XUE Jun-shuai;CHANG Yong-ming;XU Sheng-rui;BI Zhi-wei

Online:2010-08-15 Published:2021-01-20

Abstract

CLC Number:

TB43

LI Zhi-ming;HAO Yue;ZHANG Jin-cheng;CHEN Chi;XUE Jun-shuai;CHANG Yong-ming;XU Sheng-rui;BI Zhi-wei. Thermal Analysis of Susceptor Structure with Ring Groove in Vertical MOCVD Reactor[J]. Journal of Synthetic Crystals, 2010, 39(4): 1072-1077.

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Thermal Analysis of Susceptor Structure with Ring Groove in Vertical MOCVD Reactor

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