Effect of Aluminum Layer Thickness on Crystallization Process of Aluminum Induced Amorphous Silicon Films

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2011, Vol. 40 ›› Issue (1): 114-118.

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Effect of Aluminum Layer Thickness on Crystallization Process of Aluminum Induced Amorphous Silicon Films

LIANG Ge;GUo Lie-ping;LI Hong-tao;JIANG Bai-ling;JIAO Dong-mao

Online:2011-02-15 Published:2021-01-20

Abstract

CLC Number:

TB43

LIANG Ge;GUo Lie-ping;LI Hong-tao;JIANG Bai-ling;JIAO Dong-mao. Effect of Aluminum Layer Thickness on Crystallization Process of Aluminum Induced Amorphous Silicon Films[J]. Journal of Synthetic Crystals, 2011, 40(1): 114-118.

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Effect of Aluminum Layer Thickness on Crystallization Process of Aluminum Induced Amorphous Silicon Films

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