Design and Numerical Simulation of a Multi-wafer Hot-wall MOCVD Reactor

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2011, Vol. 40 ›› Issue (1): 207-212.

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Design and Numerical Simulation of a Multi-wafer Hot-wall MOCVD Reactor

PENG Xin-xin;ZUO Ran;YU Hai-qun;CHEN Jing-sheng

Online:2011-02-15 Published:2021-01-20

Abstract

CLC Number:

TN304

PENG Xin-xin;ZUO Ran;YU Hai-qun;CHEN Jing-sheng. Design and Numerical Simulation of a Multi-wafer Hot-wall MOCVD Reactor[J]. Journal of Synthetic Crystals, 2011, 40(1): 207-212.

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Design and Numerical Simulation of a Multi-wafer Hot-wall MOCVD Reactor

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