Sustaining Voltage Measurement and Erosion Mechanism of Single-crystal Silicon by Electrical Discharge Milling

JOURNAL OF SYNTHETIC CRYSTALS ›› 2011, Vol. 40 ›› Issue (1): 273-278.

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Sustaining Voltage Measurement and Erosion Mechanism of Single-crystal Silicon by Electrical Discharge Milling

LU Qing;LIU Zhi-dong;TIAN Zong-jun;QIU Ming-bo;HUANG Yin-hui

Published:2021-01-20

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CLC Number:

TG662

LU Qing;LIU Zhi-dong;TIAN Zong-jun;QIU Ming-bo;HUANG Yin-hui. Sustaining Voltage Measurement and Erosion Mechanism of Single-crystal Silicon by Electrical Discharge Milling[J]. Journal of Synthetic Crystals, 2011, 40(1): 273-278.

Sustaining Voltage Measurement and Erosion Mechanism of Single-crystal Silicon by Electrical Discharge Milling

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