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JOURNAL OF SYNTHETIC CRYSTALS ›› 2011, Vol. 40 ›› Issue (3): 763-767.

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Study on Bombardment Energy Received by Substrate Surface in Sputtering Enviromnent

LI Hong-tao;JIANG Bai-ling;YANG Bo;CAO Zheng   

  • Online:2011-06-15 Published:2021-01-20

CLC Number: