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JOURNAL OF SYNTHETIC CRYSTALS ›› 2011, Vol. 40 ›› Issue (4): 1033-1038.
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YU Hai-qun;ZUO Ran;CHEN Jing-sheng;PENG Xin-xin
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RSSOnline:2011-08-15
Published:2021-01-20
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YU Hai-qun;ZUO Ran;CHEN Jing-sheng;PENG Xin-xin. Analysis and Numerical Simulation of Precursor Concentration Distribution on the Influence of Thermophoretic Force on Depositon Process in Horizontal MOCVD Reactor[J]. Journal of Synthetic Crystals, 2011, 40(4): 1033-1038.
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