Preparation and Properties of Zn1 -xMgxO Thin Films by Radio Frequency Magnetron Sputtering Method

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2011, Vol. 40 ›› Issue (5): 1261-1265.

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Preparation and Properties of Zn1 -xMgxO Thin Films by Radio Frequency Magnetron Sputtering Method

WANG Yan-li;YANG Yuan-zheng;GAO Zhen-jie;XIE Zhi-wei;CHEN Xian-chao;HE Yu-ding

Online:2011-10-15 Published:2021-01-20

Abstract

CLC Number:

O484.1

WANG Yan-li;YANG Yuan-zheng;GAO Zhen-jie;XIE Zhi-wei;CHEN Xian-chao;HE Yu-ding. Preparation and Properties of Zn1 -xMgxO Thin Films by Radio Frequency Magnetron Sputtering Method[J]. Journal of Synthetic Crystals, 2011, 40(5): 1261-1265.

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Preparation and Properties of Zn1 -xMgxO Thin Films by Radio Frequency Magnetron Sputtering Method

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