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JOURNAL OF SYNTHETIC CRYSTALS ›› 2012, Vol. 41 ›› Issue (3): 599-604.
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GUI Quan-hong;SHE Xing-xin
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RSSOnline:2012-06-15
Published:2021-01-20
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GUI Quan-hong;SHE Xing-xin. Study on Microcrystalline Silicon Thin Films Deposited on Different Substrates by PECVD[J]. Journal of Synthetic Crystals, 2012, 41(3): 599-604.
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