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JOURNAL OF SYNTHETIC CRYSTALS ›› 2005, Vol. 34 ›› Issue (2): 359-363.

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Effect of Methane Concentration on Process of Chemical Vapor Deposition of Diamond Film by Monte Carlo Simulation

SHANG Yong;DONG Li-fang;Ma Bo-Qin;WANG Zhi-jun   

  • Online:2005-04-15 Published:2021-01-20

CLC Number: