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JOURNAL OF SYNTHETIC CRYSTALS ›› 2005, Vol. 34 ›› Issue (6): 982-985.

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LPCVD Growth of 3C-SiC on Si Mesas and SiO2/Si Substrates for MEMS Applications

SUN Guo-sheng;WANG Lei;GONG Quan-cheng;GAO Xin;LIU Xing-fang;ZENG Yi-ping;LI Jin-min   

  • Online:2005-12-15 Published:2021-01-20

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