Homoepitaxial Growth of 4H-SiC and Ti/4H-SiC SBDs

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2005, Vol. 34 ›› Issue (6): 1006-1010.

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Homoepitaxial Growth of 4H-SiC and Ti/4H-SiC SBDs

SUN Guo-sheng;NING Jin;GAO Xin;GONG Quan-cheng;WANG Lei;LIU Xing-fang;ZENG Yi-ping;LI Jin-min

Online:2005-12-15 Published:2021-01-20

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CLC Number:

TN304

SUN Guo-sheng;NING Jin;GAO Xin;GONG Quan-cheng;WANG Lei;LIU Xing-fang;ZENG Yi-ping;LI Jin-min. Homoepitaxial Growth of 4H-SiC and Ti/4H-SiC SBDs[J]. Journal of Synthetic Crystals, 2005, 34(6): 1006-1010.

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Homoepitaxial Growth of 4H-SiC and Ti/4H-SiC SBDs

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