Hydrogented Microcrystalline Silicon Films and Single Junction Solar Cell by VHF-PECVD

JOURNAL OF SYNTHETIC CRYSTALS ›› 2005, Vol. 34 ›› Issue (6): 1122-1125.

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Hydrogented Microcrystalline Silicon Films and Single Junction Solar Cell by VHF-PECVD

WU Zhi-meng;LEI Qing-song;ZHAO Ying;GENG Xin-hua;XI Jian-ping

Online:2005-12-15 Published:2021-01-20

Abstract

CLC Number:

TN304.055

WU Zhi-meng;LEI Qing-song;ZHAO Ying;GENG Xin-hua;XI Jian-ping. Hydrogented Microcrystalline Silicon Films and Single Junction Solar Cell by VHF-PECVD[J]. Journal of Synthetic Crystals, 2005, 34(6): 1122-1125.

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Hydrogented Microcrystalline Silicon Films and Single Junction Solar Cell by VHF-PECVD

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