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JOURNAL OF SYNTHETIC CRYSTALS ›› 2006, Vol. 35 ›› Issue (3): 560-564.
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PENG Ying-cai;MA Lei;KANG Jian-bo;FAN Zhi-dong;JIAN Hong-bin
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RSSOnline:2006-06-15
Published:2021-01-20
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PENG Ying-cai;MA Lei;KANG Jian-bo;FAN Zhi-dong;JIAN Hong-bin. Low Pressure Chemical Vapor Deposition of Nanograin Polysilicon Thin Films[J]. Journal of Synthetic Crystals, 2006, 35(3): 560-564.
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