Irradiated Damages of Femtosecond Laser in Two Different Monocrystalline Silicon Wafers

JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (1): 99-104.

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Irradiated Damages of Femtosecond Laser in Two Different Monocrystalline Silicon Wafers

MA Peng-fei;LIU Zhong-shan;CHANG Fang-gao;SONG Gui-lin;WANG Ke-dong

Online:2013-01-15 Published:2021-01-20

Abstract

CLC Number:

O77+4

MA Peng-fei;LIU Zhong-shan;CHANG Fang-gao;SONG Gui-lin;WANG Ke-dong. Irradiated Damages of Femtosecond Laser in Two Different Monocrystalline Silicon Wafers[J]. Journal of Synthetic Crystals, 2013, 42(1): 99-104.

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Irradiated Damages of Femtosecond Laser in Two Different Monocrystalline Silicon Wafers

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