Effect of Sputtering Pressure on Optical and Electrical Properties of Boron-doped ZnO Thin Films

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (5): 833-836.

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Effect of Sputtering Pressure on Optical and Electrical Properties of Boron-doped ZnO Thin Films

HUA Qi-lin;YANG Pei-zhi;YANG Wen;FU Rui;DENG Shuang;PENG Liu-jun

Online:2013-05-15 Published:2021-01-20

Abstract

CLC Number:

TB34

HUA Qi-lin;YANG Pei-zhi;YANG Wen;FU Rui;DENG Shuang;PENG Liu-jun. Effect of Sputtering Pressure on Optical and Electrical Properties of Boron-doped ZnO Thin Films[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2013, 42(5): 833-836.

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Effect of Sputtering Pressure on Optical and Electrical Properties of Boron-doped ZnO Thin Films

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