Effect of Annealing on the Surface Structure of 6H-SiC Wafer in Ar Atmosphere

Welcome to JOURNAL OF SYNTHETIC CRYSTALS! Today is

E-mail Alert　

RSS

Share:

JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (5): 865-868.

Previous Articles Next Articles

Effect of Annealing on the Surface Structure of 6H-SiC Wafer in Ar Atmosphere

JIANG Tao;YAN Cheng-feng;CHEN Jian-jun;LIU Xi;YANG Jian-hua;SHI Er-wei

Online:2013-05-15 Published:2021-01-20

Abstract

CLC Number:

O771

JIANG Tao;YAN Cheng-feng;CHEN Jian-jun;LIU Xi;YANG Jian-hua;SHI Er-wei. Effect of Annealing on the Surface Structure of 6H-SiC Wafer in Ar Atmosphere[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2013, 42(5): 865-868.

[1]	KE Rui;ZHANG Yu-min;CHEN Zi-yi;ZHOU Yu-feng;SONG Zhi-cheng. Study on Creep Property of Sapphire Single Crystal during Nanoindentation [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2014, 43(3): 487-491.
[2]	SONG Sheng;CUI Ying-xin;YANG Kun;XU Xian-gang;HU Xiao-bo;HUANG Wan-xia;YUAN Qing-xi. Quantitative Calculation of the Residual Stress in Crystal Based on Synchrotron Radiation White Beam Topography [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2013, 42(12): 2515-2519.
[3]	HU Ke-yan;TANG Hui-li;WANG Jing-ya;QIAN Xiao-bo;XU Jun;YANG Qiu-hong. Research on Mechenical Properties and Dislocation Defects of Sapphire Crystal Grown by Edge-Defined Film-Fed Method [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2013, 42(7): 1252-1256.
[4]	. Study on the Structure and Spectral Properties of 5at; Yb∶ GdTaO4 Grown by Czochralski Method [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2013, 42(5): 788-793.
[5]	JIANG Jian-jun;DAI Li-dong;LI He-ping;HU Hai-ying;HUI Ke-shi;SHAN Shuang-ming. Experimental Study on Impedance Spectra of Natural Emei Mountain Basalt under High Temperature and High Pressure [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2013, 42(5): 968-975.
[6]	PENG Yan;NING Li-na;GAO Yu-qiang;XU Hua-yong;SONG Sheng;JIANG Kai;HU Xiao-bo;XU Xian-gang. Study on Surface Morphology and Polytype Transition of 4H-SiC Single Crystals [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2010, 39(3): 559-563.
[7]	GAO Yu-qiang;PENG Yan;LI Juan;CHEN Xiu-fang;HU Xiao-bo;XU Xian-gang;JIANG Min-hua. Growth and Defect Characterization of 6H-SiC Single Crystal Seeded (1015) Plane [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2010, 39(2): 287-290.
[8]	WANG Ying-min;NING Li-na;PENG Yan;XU Hua-yong;HU Xiao-bo;XU Xian-gang. Analysis on Surface Morphology and Defect Generation at the Initial Stages of 6H-SiC Sublimation Growth [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2009, 38(1): 7-10.
[9]	JIANG Shou-zhen;LI Juan;CHEN Xiu-fang;WANG Ying-min;NING Li-na;HU Xiao-bo;XU Xian-gang;WANG Ji-yang;JIANG Min-hua. Sublimation Growth of 6H-SiC Single Crystal along [1-100] Direction [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2007, 36(1): 14-17.
[10]	PENG Guan-liang;LI Shu-zhi;ZHUANG Yi;ZOU Jun;WANG Yin-zhen;LIU Shi-liang;ZHOU Guo-qing;ZHOU Sheng-ming;XU Jun;GAN Fu-xi. Effect of Surface Morphology of c-plane Sapphire Substrate on Quality of γ-LiAlO2 Layer Fabricated by Vapor Transport Equilibration Technique [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2005, 34(5): 833-837.
[11]	PENG Guan-liang;ZHOU Guo-qing;Zhuang Yi;ZOU Jun;WANG Yin-zhen;LI Shu-zhi;YANG Wei-qiao;ZHOU Sheng-ming;XU Jun. Defect Study of r-plane Sapphire Single Crystal Grown by Temperature Gradient Technique [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2005, 34(4): 653-656.
[12]	PENG Guan-liang;Zhuang Yi;ZOU Jun;WANG Yin-zhen;LIU Shi-liang;ZHOU Guo-qing;ZHOU Sheng-ming;XU Jun;GAN Fu-xi. Study on the Growth of Pure and Ga3+ Doped γ-LiAlO2 Crystals [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2005, 34(3): 399-402.
[13]	. Study on Surface Morphology of Sapphire Crystal Grown by Temperature Gradient Technique(TGT) [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2004, 33(6): 882-886.
[14]	. Defects and Performances of Bi4Ge3O12 Crystal-(1) Defects and Its Formation [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2004, 33(6): 940-944.
[15]	. Observation of Micropipes in 6H-SiC Monocrystalline by Synchrotron Radiation Monochromatic X-ray Topography [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2004, 33(3): 332-334.

Effect of Annealing on the Surface Structure of 6H-SiC Wafer in Ar Atmosphere

PDF (PC)

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 15

Recommended Articles

Metrics

Comments