Influence Mechanisms of Hydrogen on the Preferred Orientation of AlN Films

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (6): 1021-1025.

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Influence Mechanisms of Hydrogen on the Preferred Orientation of AlN Films

JIANG Chuan;ZHOU Ling-ping;PENG Kun;ZHU Jia-jun;LI De-yi

Online:2013-06-15 Published:2021-01-20

Abstract

CLC Number:

TB321

JIANG Chuan;ZHOU Ling-ping;PENG Kun;ZHU Jia-jun;LI De-yi. Influence Mechanisms of Hydrogen on the Preferred Orientation of AlN Films[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2013, 42(6): 1021-1025.

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Influence Mechanisms of Hydrogen on the Preferred Orientation of AlN Films

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