Low-temperature Deposition and Bonding Performance of Silicon Nanocrystals in Silicon Oxide Films

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (6): 1035-1040.

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Low-temperature Deposition and Bonding Performance of Silicon Nanocrystals in Silicon Oxide Films

YU Wei;WANG Jian-tao;LI Yun;GUO Shao-gang;ZHU Hai-rong;FU Guang-sheng

Online:2013-06-15 Published:2021-01-20

Abstract

CLC Number:

O77

YU Wei;WANG Jian-tao;LI Yun;GUO Shao-gang;ZHU Hai-rong;FU Guang-sheng. Low-temperature Deposition and Bonding Performance of Silicon Nanocrystals in Silicon Oxide Films[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2013, 42(6): 1035-1040.

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Low-temperature Deposition and Bonding Performance of Silicon Nanocrystals in Silicon Oxide Films

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