Formation and Evolution of Nodules on the Sn-doped In2O3 Ceramic Target During DC Magnetron Sputtering

JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (8): 1590-1594.

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Formation and Evolution of Nodules on the Sn-doped In2O3 Ceramic Target During DC Magnetron Sputtering

HOU Jun-feng;LI Zhi-you;ZHOU Ke-chao;SUN Ben-shuang;JIANG He

Online:2013-08-15 Published:2021-01-20

Abstract

CLC Number:

TF122

HOU Jun-feng;LI Zhi-you;ZHOU Ke-chao;SUN Ben-shuang;JIANG He. Formation and Evolution of Nodules on the Sn-doped In2O3 Ceramic Target During DC Magnetron Sputtering[J]. Journal of Synthetic Crystals, 2013, 42(8): 1590-1594.

Formation and Evolution of Nodules on the Sn-doped In2O3 Ceramic Target During DC Magnetron Sputtering

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