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JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (9): 1750-1756.
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ZHANG Xue-yu;WU Hua;LIU Yao-dong;WU Ai-min
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RSSOnline:2013-09-15
Published:2021-01-20
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ZHANG Xue-yu;WU Hua;LIU Yao-dong;WU Ai-min. Influence of Argon Flow Rate on Structure and Properties of Hydrogenated Nanocrystalline Silicon Films Prepared by ECR-PECVD[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2013, 42(9): 1750-1756.
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