Effects of O2/Ar Ratio and Substrate Temperature on the Structure and Optical Properties of Cu2O Thin Films Deposited by Pulse Magnetron Sputtering

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (9): 1802-1807.

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Effects of O2/Ar Ratio and Substrate Temperature on the Structure and Optical Properties of Cu2O Thin Films Deposited by Pulse Magnetron Sputtering

ZI Xing-fa;YANG Wen;YANG Pei-zhi;DUAN Liang-fei;ZHANG Li-yuan

Online:2013-09-15 Published:2021-01-20

Abstract

CLC Number:

TB34

ZI Xing-fa;YANG Wen;YANG Pei-zhi;DUAN Liang-fei;ZHANG Li-yuan. Effects of O2/Ar Ratio and Substrate Temperature on the Structure and Optical Properties of Cu2O Thin Films Deposited by Pulse Magnetron Sputtering[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2013, 42(9): 1802-1807.

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Effects of O2/Ar Ratio and Substrate Temperature on the Structure and Optical Properties of Cu2O Thin Films Deposited by Pulse Magnetron Sputtering

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