Effect of Crucible Surface Coating on Transport of As-grown Impurity in Multicrystalline Silicon

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (10): 2177-2182.

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Effect of Crucible Surface Coating on Transport of As-grown Impurity in Multicrystalline Silicon

JI Shang-si;ZUO Ran;SU Wen-jia;HAN Jiang-shan

Published:2021-01-20

Abstract

CLC Number:

O731

JI Shang-si;ZUO Ran;SU Wen-jia;HAN Jiang-shan. Effect of Crucible Surface Coating on Transport of As-grown Impurity in Multicrystalline Silicon[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2013, 42(10): 2177-2182.

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Effect of Crucible Surface Coating on Transport of As-grown Impurity in Multicrystalline Silicon

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