JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (11): 2246-2251.

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Effect of Discharge Power on the Growth Process of VHF-PECVD Microcrystalline Silicon Films

YANG Shi-e;CUI Zong-chao;GUO Qiao-neng;CHEN Yong-sheng;LI Yan-yang;LU Jing-xiao   

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