Study on the Lapping Process of Sapphire Substrate through Fixed Abrasive

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (11): 2258-2264.

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Study on the Lapping Process of Sapphire Substrate through Fixed Abrasive

LI Peng-peng;LI Jun;WANG Jian-bin;XIA Lei;ZHU Yong-wei;ZUO Dun-wen

Online:2013-11-15 Published:2021-01-20

Abstract

CLC Number:

TH161
TG74+1

LI Peng-peng;LI Jun;WANG Jian-bin;XIA Lei;ZHU Yong-wei;ZUO Dun-wen. Study on the Lapping Process of Sapphire Substrate through Fixed Abrasive[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2013, 42(11): 2258-2264.

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Study on the Lapping Process of Sapphire Substrate through Fixed Abrasive

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