Growth Process of Si Nanoparticles and Spatial Distribution of Si Ions Based on Langmuir Probe Diagnosis

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (12): 2686-2690.

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Growth Process of Si Nanoparticles and Spatial Distribution of Si Ions Based on Langmuir Probe Diagnosis

DENG Ze-chao;LIU Hai-yan;ZHANG Xiao-long;CHU Li-zhi;DING Xue-cheng;QIN Ai-li;WANG Ying-long

Published:2021-01-20

Abstract

CLC Number:

TN304

DENG Ze-chao;LIU Hai-yan;ZHANG Xiao-long;CHU Li-zhi;DING Xue-cheng;QIN Ai-li;WANG Ying-long. Growth Process of Si Nanoparticles and Spatial Distribution of Si Ions Based on Langmuir Probe Diagnosis[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2013, 42(12): 2686-2690.

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Growth Process of Si Nanoparticles and Spatial Distribution of Si Ions Based on Langmuir Probe Diagnosis

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