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JOURNAL OF SYNTHETIC CRYSTALS ›› 2014, Vol. 43 ›› Issue (3): 693-697.
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XIAO Qiang;HE Xue-li
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RSSOnline:2014-03-15
Published:2021-01-20
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XIAO Qiang;HE Xue-li. Simulation Analysis and Experimental Research of High Efficiency and Low Damage Processing Mechanism for SiC Single Crystal Chip[J]. Journal of Synthetic Crystals, 2014, 43(3): 693-697.
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