Numerical Optimization of a Chamber Structure Design for the Wet Etching

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2014, Vol. 43 ›› Issue (5): 1110-1114.

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Numerical Optimization of a Chamber Structure Design for the Wet Etching

WANG Wei;XIANG Dong;YANG Wei;XIA Huan-xiong;ZHANG Han

Online:2014-05-15 Published:2021-01-20

Abstract

CLC Number:

TN305

WANG Wei;XIANG Dong;YANG Wei;XIA Huan-xiong;ZHANG Han. Numerical Optimization of a Chamber Structure Design for the Wet Etching[J]. Journal of Synthetic Crystals, 2014, 43(5): 1110-1114.

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Numerical Optimization of a Chamber Structure Design for the Wet Etching

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