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JOURNAL OF SYNTHETIC CRYSTALS ›› 2014, Vol. 43 ›› Issue (5): 1179-1185.

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Numerical Simulation Study on Chemical Reaction-transport Process of AlN MOCVD Growth

LU Qin;ZUO Ran;LIU Peng;TONG Yu-zhen;ZHANG Guo-yi   

  • Online:2014-05-15 Published:2021-01-20

CLC Number: