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JOURNAL OF SYNTHETIC CRYSTALS ›› 2014, Vol. 43 ›› Issue (5): 1193-1198.

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Influence of Argon Flow Rate on the Solid/Liquid Interface, Thermal Stress and Oxygen Concentration in the 400 mm CZ Silicon with a Magnetic Field

  

  • Online:2014-05-15 Published:2021-01-20