Study on the Subsurface Damage Depth of the Lapped SiC Wafers

JOURNAL OF SYNTHETIC CRYSTALS ›› 2014, Vol. 43 ›› Issue (6): 1500-1503.

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Study on the Subsurface Damage Depth of the Lapped SiC Wafers

WANG Dong;ZHANG Yin-xia;GAO Wei;YANG Le-le;SU Jian-xiu

Online:2014-06-15 Published:2021-01-20

Abstract

CLC Number:

O433.4

WANG Dong;ZHANG Yin-xia;GAO Wei;YANG Le-le;SU Jian-xiu. Study on the Subsurface Damage Depth of the Lapped SiC Wafers[J]. Journal of Synthetic Crystals, 2014, 43(6): 1500-1503.

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Study on the Subsurface Damage Depth of the Lapped SiC Wafers

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