Investigation on the Uniformity and Optical Absorption Properties of Amorphous Si Thin Films Prepared by RF Magnetron Sputtering

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2014, Vol. 43 ›› Issue (7): 1718-1722.

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Investigation on the Uniformity and Optical Absorption Properties of Amorphous Si Thin Films Prepared by RF Magnetron Sputtering

DUAN Liang-fei;YANG Wen;YANG Pei-zhi;ZHANG Li-yuan;TU Ye;LI Xue-ming

Online:2014-07-15 Published:2021-01-20

Abstract

CLC Number:

TN304

DUAN Liang-fei;YANG Wen;YANG Pei-zhi;ZHANG Li-yuan;TU Ye;LI Xue-ming. Investigation on the Uniformity and Optical Absorption Properties of Amorphous Si Thin Films Prepared by RF Magnetron Sputtering[J]. Journal of Synthetic Crystals, 2014, 43(7): 1718-1722.

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Investigation on the Uniformity and Optical Absorption Properties of Amorphous Si Thin Films Prepared by RF Magnetron Sputtering

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