Numerical Simulation of Radiation Exchange in Siemens CVD Reactor

JOURNAL OF SYNTHETIC CRYSTALS ›› 2014, Vol. 43 ›› Issue (7): 1774-1780.

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Numerical Simulation of Radiation Exchange in Siemens CVD Reactor

NIE Zhi-feng;XIE Gang;HOU Yan-qing;CUI Yan;LI Rong-xing;SONG Dong-ming

Online:2014-07-15 Published:2021-01-20

Abstract

CLC Number:

TQ018

NIE Zhi-feng;XIE Gang;HOU Yan-qing;CUI Yan;LI Rong-xing;SONG Dong-ming. Numerical Simulation of Radiation Exchange in Siemens CVD Reactor[J]. Journal of Synthetic Crystals, 2014, 43(7): 1774-1780.

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Numerical Simulation of Radiation Exchange in Siemens CVD Reactor

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