Study on the Evolution of Microcrystalline Silicon Thin Film Surface Roughness

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2014, Vol. 43 ›› Issue (9): 2384-2388.

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Study on the Evolution of Microcrystalline Silicon Thin Film Surface Roughness

LI Xin-li;MA Zhan-hong;REN Feng-zhang;XU Rong-hui;LIU Yong

Online:2014-09-15 Published:2021-01-20

Abstract

CLC Number:

O484.1

LI Xin-li;MA Zhan-hong;REN Feng-zhang;XU Rong-hui;LIU Yong. Study on the Evolution of Microcrystalline Silicon Thin Film Surface Roughness[J]. Journal of Synthetic Crystals, 2014, 43(9): 2384-2388.

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Study on the Evolution of Microcrystalline Silicon Thin Film Surface Roughness

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