Influence of RF Power on Microstructure and Electrical Properties of Si Thin Films

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2014, Vol. 43 ›› Issue (11): 2835-2839.

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Influence of RF Power on Microstructure and Electrical Properties of Si Thin Films

HAO Juan;JIANG Bai-ling;YANG Chao;DONG Dan;ZHANG Tong-hui

Online:2014-11-15 Published:2021-01-20

Abstract

CLC Number:

TB321

HAO Juan;JIANG Bai-ling;YANG Chao;DONG Dan;ZHANG Tong-hui. Influence of RF Power on Microstructure and Electrical Properties of Si Thin Films[J]. Journal of Synthetic Crystals, 2014, 43(11): 2835-2839.

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Influence of RF Power on Microstructure and Electrical Properties of Si Thin Films

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