Influence of the Key Structures and the Main Process Parameters on the Etching Property of Chamber of Wet Etching Machine

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2015, Vol. 44 ›› Issue (4): 1056-1062.

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Influence of the Key Structures and the Main Process Parameters on the Etching Property of Chamber of Wet Etching Machine

YANG Wei;XIANG Dong;DU Fei;WANG Wei;TIAN Hao

Online:2015-04-15 Published:2021-01-20

Abstract

CLC Number:

TN305

YANG Wei;XIANG Dong;DU Fei;WANG Wei;TIAN Hao. Influence of the Key Structures and the Main Process Parameters on the Etching Property of Chamber of Wet Etching Machine[J]. Journal of Synthetic Crystals, 2015, 44(4): 1056-1062.

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Influence of the Key Structures and the Main Process Parameters on the Etching Property of Chamber of Wet Etching Machine

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