Phase-field Simulation for the Growth Dynamics of Double Voids during Czochralski Silicon Crystal Growth

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2015, Vol. 44 ›› Issue (5): 1207-1212.

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Phase-field Simulation for the Growth Dynamics of Double Voids during Czochralski Silicon Crystal Growth

GUAN Xiao-jun;WANG Jin;ZHANG Xiang-yu;ZENG Qing-kai

Online:2015-05-15 Published:2021-01-20

Abstract

CLC Number:

O77

GUAN Xiao-jun;WANG Jin;ZHANG Xiang-yu;ZENG Qing-kai. Phase-field Simulation for the Growth Dynamics of Double Voids during Czochralski Silicon Crystal Growth[J]. Journal of Synthetic Crystals, 2015, 44(5): 1207-1212.

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Phase-field Simulation for the Growth Dynamics of Double Voids during Czochralski Silicon Crystal Growth

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