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JOURNAL OF SYNTHETIC CRYSTALS ›› 2015, Vol. 44 ›› Issue (6): 1516-1522.

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Preparation of ITO Thin Films by RF Magnetron Sputtering at Low Temperature

WANG Xiu-juan;SI Jia-le;YANG De-lin;GU Jin-hua;LU Jing-xiao   

  • Online:2015-06-15 Published:2021-01-20

CLC Number: