Influence of Hydrogen Flow Rates on Bond Structures and Optical Properties of Silicon-rich Nitride Films

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2015, Vol. 44 ›› Issue (12): 3449-3454.

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Influence of Hydrogen Flow Rates on Bond Structures and Optical Properties of Silicon-rich Nitride Films

WUREN Tu-ya;ZHOU Bing-qing;ZHANG Lin-rui;GAO Ai-ming;ZHANG Na

Online:2015-12-15 Published:2021-01-20

Abstract

CLC Number:

TM914

WUREN Tu-ya;ZHOU Bing-qing;ZHANG Lin-rui;GAO Ai-ming;ZHANG Na. Influence of Hydrogen Flow Rates on Bond Structures and Optical Properties of Silicon-rich Nitride Films[J]. Journal of Synthetic Crystals, 2015, 44(12): 3449-3454.

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Influence of Hydrogen Flow Rates on Bond Structures and Optical Properties of Silicon-rich Nitride Films

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