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JOURNAL OF SYNTHETIC CRYSTALS ›› 2016, Vol. 45 ›› Issue (3): 623-628.
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ZHOU Jing-jing;XIAO Shao-qing;YAO Yao;GU Xiao-feng
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RSSOnline:2016-03-15
Published:2021-01-20
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ZHOU Jing-jing;XIAO Shao-qing;YAO Yao;GU Xiao-feng. Study on Low-temperature Silicon Nitride Passivation Films Based on Advanced Plasma[J]. Journal of Synthetic Crystals, 2016, 45(3): 623-628.
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